Products & SolutionsNitrogen Gas Booth

Highly airtight booth for large spaces

This highly airtight booth achieves an oxygen concentration of 1 ppm or less and can be scaled up through on-site construction.


1. Support for large booths by on-site construction

2. Highly airtight, highly insulated

3. Lighter weight due to highly airtight panels

4. Equipped with safety devices for low-oxygen environments


Material properties Highly airtight panel
Moisture concentration 1 ppm max. (-76°C DP)
Oxygen concentration 1 ppm max.
Cleanliness ISO Class 1 to 3 (Booth alone)

Patent application publication number: 2020-193765

Patent number: 7080478

Stainless steel booth
*Stainless steel booths are also available.

System Overview

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Safety Specifications

Disaster prevention measures are crucial in areas at risk of oxygen deficiency. Our nitrogen gas booths are equipped with an adequate safety system. You can use our booths with peace of mind.

Oxygen deficiency :
A decrease in the concentration of oxygen in the air.
Anoxia :
A condition caused by the body’s inability to absorb the necessary oxygen.
It can cause dizziness, loss of consciousness, and even death.

*When working in areas where there is a risk of oxygen deficiency or hydrogen sulfide poisoning as defined by the Industrial Safety and Health Act, a chief of oxygen-deficient/hydrogen sulfide danger must be appointed in accordance with the law to prevent poisoning or deficiency, as well as to administer first aid to injured or ill individuals.

Application Examples

  • OLEDs
  • Lithium-ion batteries
  • Semiconductors