Products & SolutionsCirculating Nitrogen Purifier
Only One of Its Kind in Japan―For Large Spaces
Original refining machine equipped with a desiccant dehumidification system
Equipment that circulates gas within the booth, creating a nitrogen environment with moisture and oxygen concentrations at 1 ppm or below.
The equipment is used in manufacturing processes requiring nitrogen-rich environments, like producing organic light-emitting diode (OLED) displays.
1. High air volume capacity (up to 2300 m3/h)
2. Includes atmospheric drying mode
3. Multi-booth control supported
|Moisture concentration (ppm)||1 ppm max.|
|Oxygen concentration (ppm)||1 ppm max.|
|Flow rate (m3/h)||1000||1600||2300|
|Maximum supported volume (m3)*2||100||160||230|
*1. The chiller unit is included with the refining machine.
*2. The supported volume varies based on the start-up time.
- Organic light-emitting diodes (OLEDs)
- Lithium-ion batteries
- All-solid-state batteries